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Author : Dinesh C. Gupta
Publisher : ASTM International
Page : 472 pages
File Size : 42,7 Mb
Release : 1989
Category : Metallizing
ISBN : 9780803112735
Author : Peter E. Gise,Richard Blanchard
Publisher : Prentice Hall
Page : 280 pages
File Size : 42,6 Mb
Release : 1986
Category : Technology & Engineering
ISBN : STANFORD:36105030417492
Author : Gary S. May,S. M. Sze
Publisher : John Wiley & Sons
Page : 0 pages
File Size : 49,5 Mb
Release : 2004
Category : Integrated circuits
ISBN : 0471452386
"This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition. The book integrates Computer Modeling & Simulation tools throughout. Process simulation is used as a tool for what-if analysis and discussion. Comprehensive coverage of process sequence helps readers connect individual steps into a cohesive whole."--
Author : Chue San Yoo
Publisher : World Scientific
Page : 483 pages
File Size : 50,9 Mb
Release : 2008
Category : Technology & Engineering
ISBN : 9789812568236
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Author : Gary S. May,Costas J. Spanos
Publisher : John Wiley & Sons
Page : 428 pages
File Size : 50,6 Mb
Release : 2006-05-26
Category : Technology & Engineering
ISBN : 9780471790273
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Author : Yoshio Nishi,Robert Doering
Publisher : CRC Press
Page : 3276 pages
File Size : 42,5 Mb
Release : 2017-12-19
Category : Technology & Engineering
ISBN : 9781351829823
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Author : S. M. Sze
Publisher : John Wiley & Sons
Page : 582 pages
File Size : 41,6 Mb
Release : 2012-08-01
Category : Semiconductors
ISBN : 0470873671
Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
Author : Simon M. Sze
Publisher : Wiley
Page : 576 pages
File Size : 46,7 Mb
Release : 2001-09-25
Category : Technology & Engineering
ISBN : 0471333727
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
Author : Hong Xiao
Publisher : SPIE-International Society for Optical Engineering
Page : 0 pages
File Size : 47,5 Mb
Release : 2012
Category : Integrated circuits
ISBN : 081949092X
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
Author : HONG. XIAO
Publisher : Unknown
Page : 128 pages
File Size : 52,7 Mb
Release : 2012
Category : Electronic
ISBN : 1510616535
Author : James D. Plummer,Peter B. Griffin
Publisher : Cambridge University Press
Page : 679 pages
File Size : 55,6 Mb
Release : 2023-10-31
Category : Technology & Engineering
ISBN : 9781009303583
Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-art CMOS process flow, exposes students to big-picture thinking from the outset, and encourages a practical integration mindset. Extensive use of process and TCAD simulation, using industry tools such as Silvaco Athena and Victory Process, provides students with deeper insight into physical principles, and prepares them for applying these tools in a real-world setting. Accessible framing assumes only a basic background in chemistry, physics and mathematics, providing a gentle introduction for students from a wide range of backgrounds; and over 450 figures (many in color), and more than 280 end-of-chapter problems, will support and cement student understanding. Accompanied by lecture slides and solutions for instructors, this is the ideal introduction to semiconductor technology for senior undergraduate and graduate students in electrical engineering, materials science and physics, and for semiconductor engineering professionals seeking an authoritative introductory reference.
Author : Jitendra Kumar Katiyar,Ranjeet Kumar Sahu
Publisher : CRC Press
Page : 142 pages
File Size : 49,6 Mb
Release : 2021-12-03
Category : Technology & Engineering
ISBN : 9781000540710
Modern Manufacturing Technology: Spotlight on Future summarizes the emergence and development of modern manufacturing techniques (MMTs) with a focus on metallic and advanced material-based additive manufacturing technologies and their potential applications. Further, it explores advanced machining techniques for production of novel nanomaterials. The book also covers modern sophisticated techniques for the fabrication of ultrafine electronic devices such as micro-electromechanical systems (MEMS), nano-electromechanical systems (NEMS), semiconductors, and optical systems. A dedicated chapter on manufacturing technology for Industry 4.0 is included. Features: Describes the background of manufacturing techniques in brief including the advent of and introduction to MMTs Reviews various types of MMTs established in recent years and their accelerated growth and development innovation-driven applications Overviews the physical and chemical techniques used for nanomaterials production Explores the fabrication mechanisms of MEMS, NEMS, semiconductors and optical devices Provides a conceptual overview of additive manufacturing technologies This book is geared to undergraduate and postgraduate students and professionals in mechanical and manufacturing engineering, and the manufacturing industry.
Author : Yaguang Lian
Publisher : John Wiley & Sons
Page : 324 pages
File Size : 43,7 Mb
Release : 2022-10-18
Category : Technology & Engineering
ISBN : 9781119867784
Semiconductor Microchips and Fabrication Advanced and highly illustrated guide to semiconductor manufacturing from an experienced industry insider Semiconductor Microchips and Fabrication is a practical yet advanced book on the theory, design, and manufacturing of semiconductor microchips that describes the process using the principles of physics and chemistry, fills in the knowledge gaps for professionals and students who need to know how manufacturing equipment works, and provides valuable suggestions and solutions to many problems that students or engineers often encounter in semiconductor processing, including useful experiment results to help in process work. The explanation of the semiconductor manufacturing process, and the equipment needed, is carried out based on the machines that are used in clean rooms over the world so readers understand how they can use the equipment to achieve their design and manufacturing ambitions. Combining theory with practice, all descriptions are carried out around the actual equipment and processes by way of a highly visual text, with illustrations including equipment pictures, manufacturing process schematics, and structures of semiconductor microchips. Sample topics covered in Semiconductor Microchips and Fabrication include: An introduction to basic concepts, such as impedance mismatch from plasma machines and theories, such as energy bands and Clausius-Clapeyron equation Basic knowledge used in semiconductor devices and manufacturing machines, including DC and AC circuits, electric fields, magnetic fields, resonant cavity, and the components used in the devices and machines Transistor and integrated circuits, including bipolar transistors, junction field effect transistors, and metal-semiconductor field effect transistors The main processes used in the manufacturing of microchips, including lithography, metallization, reactive-ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD), thermal oxidation and implantation, and more The skills in the design and problem solving of processes, such as how to design a dry etching recipe, and how to solve the micro-grass problems in Bosch process Through Semiconductor Microchips and Fabrication, readers can obtain the fundamental knowledge and skills of semiconductor manufacturing, which will help them better understand and use semiconductor technology to improve their product quality or project research. Before approaching this text, readers should have basic knowledge of physics, chemistry, and circuitry.
Author : Peter Van Zant
Publisher : McGraw-Hill Companies
Page : 656 pages
File Size : 53,6 Mb
Release : 1997
Category : Technology & Engineering
ISBN : UOM:39015038126200
s an easy-to-follow introduction to semiconductor fabrication that proceeds from basic materials and process chemicals to chip packaging procedures. New methods and data related to packaging, memory circuits, and semiconductor devices are key updates in this new edition.
Author : Chenming Hu
Publisher : Prentice Hall
Page : 387 pages
File Size : 46,9 Mb
Release : 2010
Category : Integrated circuits
ISBN : 9780136085256
Modern Semiconductor Devices for Integrated Circuits, First Edition introduces readers to the world of modern semiconductor devices with an emphasis on integrated circuit applications. KEY TOPICS Electrons and Holes in Semiconductors; Motion and Recombination of Electrons and Holes; Device Fabrication Technology; PN and Metal Semiconductor Junctions; MOS Capacitor; MOS Transistor; MOSFETs in ICs Scaling, Leakage, and Other Topics; Bipolar Transistor. MARKET Written by an experienced teacher, researcher, and expert in industry practices, this succinct and forward-looking text is appropriate for anyone interested in semiconductor devices for integrated curcuits, and serves as a suitable reference text for practicing engineers. "