Sputtering By Particle Bombardment

Author : Rainer Behrisch,Wolfgang Eckstein
Publisher : Springer Science & Business Media
Page : 527 pages
File Size : 44,7 Mb
Release : 2007-07-26
Category : Technology & Engineering
ISBN : 9783540445029

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Sputtering by Particle Bombardment by Rainer Behrisch,Wolfgang Eckstein Pdf

This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

Author : Rainer Behrisch,Klaus Wittmaack
Publisher : Unknown
Page : 410 pages
File Size : 47,5 Mb
Release : 1991
Category : Sputtering (Physics)
ISBN : OCLC:760581159

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Sputtering by Particle Bombardment III by Rainer Behrisch,Klaus Wittmaack Pdf

Author : Anonim
Publisher : Unknown
Page : 128 pages
File Size : 41,6 Mb
Release : 1983
Category : Electronic
ISBN : 0387125930

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Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography by Anonim Pdf

Author : R. Behrisch
Publisher : Springer
Page : 284 pages
File Size : 42,7 Mb
Release : 2014-08-23
Category : Science
ISBN : 3662308886

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Sputtering by Particle Bombardment I by R. Behrisch Pdf

With contributions by numerous experts

Author : Rainer Behrisch,Klaus Wittmaack
Publisher : Springer
Page : 415 pages
File Size : 51,7 Mb
Release : 2014-08-23
Category : Science
ISBN : 3662311046

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Sputtering by Particle Bombardment III by Rainer Behrisch,Klaus Wittmaack Pdf

Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.

Author : R. Behrisch
Publisher : Springer
Page : 304 pages
File Size : 41,6 Mb
Release : 1981-08-01
Category : Science
ISBN : 3540105212

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Sputtering by Particle Bombardment I by R. Behrisch Pdf

With contributions by numerous experts

Author : R. Behrisch
Publisher : Unknown
Page : 412 pages
File Size : 44,7 Mb
Release : 2014-01-15
Category : Electronic
ISBN : 3662311682

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Sputtering by Particle Bombardment II by R. Behrisch Pdf

Author : Rainer Behrisch,Wolfgang Eckstein
Publisher : Springer Science & Business Media
Page : 527 pages
File Size : 55,7 Mb
Release : 2007-07-30
Category : Technology & Engineering
ISBN : 9783540445005

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Sputtering by Particle Bombardment by Rainer Behrisch,Wolfgang Eckstein Pdf

This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

Author : Rainer Behrisch
Publisher : Unknown
Page : 128 pages
File Size : 46,8 Mb
Release : 1981
Category : Solids
ISBN : LCCN:81004313

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Sputtering by Particle Bombardment: Characteristics of sputtered particles, technical applications by Rainer Behrisch Pdf

Author : Rainer Behrisch,Klaus Wittmaack
Publisher : Springer
Page : 440 pages
File Size : 45,9 Mb
Release : 1991-09-10
Category : Science
ISBN : 3540534288

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Sputtering by Particle Bombardment III by Rainer Behrisch,Klaus Wittmaack Pdf

Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.

Author : Diederik Depla,Stijn Mahieu
Publisher : Springer Science & Business Media
Page : 584 pages
File Size : 42,8 Mb
Release : 2008-06-24
Category : Technology & Engineering
ISBN : 9783540766643

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Reactive Sputter Deposition by Diederik Depla,Stijn Mahieu Pdf

In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Author : R. Behrisch
Publisher : Springer
Page : 412 pages
File Size : 54,9 Mb
Release : 1983-10-01
Category : Science
ISBN : 3540125930

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Sputtering by Particle Bombardment II by R. Behrisch Pdf

With contributions by numerous experts

Author : C.B. Duke,E. Ward Plummer
Publisher : Gulf Professional Publishing
Page : 1076 pages
File Size : 49,5 Mb
Release : 2002-05-21
Category : Science
ISBN : 0444510419

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Frontiers in Surface Science and Interface Science by C.B. Duke,E. Ward Plummer Pdf

Any notion that surface science is all about semiconductors and coatings is laid to rest by this encyclopedic publication: Bioengineered interfaces in medicine, interstellar dust, DNA computation, conducting polymers, the surfaces of atomic nuclei - all are brought up to date. Frontiers in Surface and Interface Science - a milestone publication deserving a wide readership. It combines a sweeping expert survey of research today with an educated look into the future. It is a future that embraces surface phenomena on scales from the subatomic to the galactic, as well as traditional topics like semiconductor design, catalysis, and surface processing, modeling and characterization. And, great efforts have been made to express sophisticated ideas in an attractive and accessible way. Nanotechnology, surfaces for DNA computation, polymer-based electronics, soft surfaces, interstellar surface chemistry - all feature in this comprehensive collection.

Author : Michael Nastasi,James W. Mayer,James K. Hirvonen
Publisher : Cambridge University Press
Page : 572 pages
File Size : 44,5 Mb
Release : 1996-03-29
Category : Science
ISBN : 9780521373760

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Ion-Solid Interactions by Michael Nastasi,James W. Mayer,James K. Hirvonen Pdf

Comprehensive guide to an important materials science technique for students and researchers.

Author : Bernd Schmidt,Klaus Wetzig
Publisher : Springer Science & Business Media
Page : 425 pages
File Size : 51,7 Mb
Release : 2012-12-13
Category : Technology & Engineering
ISBN : 9783211993569

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Ion Beams in Materials Processing and Analysis by Bernd Schmidt,Klaus Wetzig Pdf

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.