Alternative Lithography

Author : Clivia M. Sotomayor Torres
Publisher : Springer Science & Business Media
Page : 343 pages
File Size : 54,7 Mb
Release : 2012-12-06
Category : Science
ISBN : 9781441992048

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Alternative Lithography by Clivia M. Sotomayor Torres Pdf

Good old Gutenberg could not have imagined that his revolutionary printing concept which so greatly contributed to dissemination of knowledge and thus today 's wealth, would have been a source of inspiration five hundred years later. Now, it seems intuitive that a simple way to produce a large number of replicates is using a mold to emboss pattern you need, but at the nanoscale nothing is simple: the devil is in the detail. And this book is about the "devil". In the following 17 chapters, the authors-all of them well recognized and active actors in this emerging field-describe the state-of-the-art, today 's technological bottlenecks and the prospects for micro-contact printing and nanoimprint lithography. Many results of this book originate from projects funded by the European Com mission through its "Nanotechnology Information Devices" (NID) initiative. NID was launched with the objective to develop nanoscale devices for the time when the red brick scenario of the ITRS roadmap would be reached. It became soon clear however, that there was no point to investigate only alternative devices to CMOS, but what was really needed was an integrated approach that took into account more facets of this difficult undertaking. Technologically speaking , this meant to have a coherent strategy to develop novel devices, nanofabrication tools and circuit & system architectures at the same time.

Author : Harry J. Levinson
Publisher : SPIE Press
Page : 446 pages
File Size : 41,6 Mb
Release : 2005
Category : Technology & Engineering
ISBN : 0819456608

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Principles of Lithography by Harry J. Levinson Pdf

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Author : Stefan Landis
Publisher : John Wiley & Sons
Page : 311 pages
File Size : 50,7 Mb
Release : 2013-03-04
Category : Technology & Engineering
ISBN : 9781118621189

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Lithography by Stefan Landis Pdf

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Author : Cato T. Laurencin,Lakshmi S. Nair
Publisher : CRC Press
Page : 388 pages
File Size : 52,6 Mb
Release : 2008-06-16
Category : Medical
ISBN : 9781420051834

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Nanotechnology and Tissue Engineering by Cato T. Laurencin,Lakshmi S. Nair Pdf

Nanofabrication gives us the ability to mimic biological structures with molecular level precision. Offering a natural progression of topics, Nanotechnology and Tissue Engineering: The Scaffold provides a state-of-the-art account of groundbreaking research in this rapidly emerging area of biomedical engineering. Emphasizing the importance of scaffo

Author : Luciano Lavagno,Igor L. Markov,Grant Martin,Louis K. Scheffer
Publisher : CRC Press
Page : 798 pages
File Size : 42,5 Mb
Release : 2017-02-03
Category : Technology & Engineering
ISBN : 9781482254617

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Electronic Design Automation for IC Implementation, Circuit Design, and Process Technology by Luciano Lavagno,Igor L. Markov,Grant Martin,Louis K. Scheffer Pdf

The second of two volumes in the Electronic Design Automation for Integrated Circuits Handbook, Second Edition, Electronic Design Automation for IC Implementation, Circuit Design, and Process Technology thoroughly examines real-time logic (RTL) to GDSII (a file format used to transfer data of semiconductor physical layout) design flow, analog/mixed signal design, physical verification, and technology computer-aided design (TCAD). Chapters contributed by leading experts authoritatively discuss design for manufacturability (DFM) at the nanoscale, power supply network design and analysis, design modeling, and much more. New to This Edition: Major updates appearing in the initial phases of the design flow, where the level of abstraction keeps rising to support more functionality with lower non-recurring engineering (NRE) costs Significant revisions reflected in the final phases of the design flow, where the complexity due to smaller and smaller geometries is compounded by the slow progress of shorter wavelength lithography New coverage of cutting-edge applications and approaches realized in the decade since publication of the previous edition—these are illustrated by new chapters on 3D circuit integration and clock design Offering improved depth and modernity, Electronic Design Automation for IC Implementation, Circuit Design, and Process Technology provides a valuable, state-of-the-art reference for electronic design automation (EDA) students, researchers, and professionals.

Author : Zheng Cui
Publisher : Springer
Page : 432 pages
File Size : 53,7 Mb
Release : 2016-08-10
Category : Technology & Engineering
ISBN : 9783319393612

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Nanofabrication by Zheng Cui Pdf

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

Author : Raja Shunmugam
Publisher : CRC Press
Page : 459 pages
File Size : 42,8 Mb
Release : 2017-05-08
Category : Science
ISBN : 9781771882972

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Functional Polymers by Raja Shunmugam Pdf

This new book covers the synthetic as well application aspects of functional polymers. It highlights modern trends in the field and showcases the recent characterization techniques that are being employed in the field of polymer science. The chapters are written by top-notch scientists who are internationally recognized in the field. The chapters will highlight the modern trend in the field.

Author : Clivia M Sotomayor Torres
Publisher : Unknown
Page : 360 pages
File Size : 45,9 Mb
Release : 2003-12-01
Category : Electronic
ISBN : 1441992057

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Alternative Lithography by Clivia M Sotomayor Torres Pdf

Author : Anonim
Publisher : Elsevier
Page : 634 pages
File Size : 45,6 Mb
Release : 2016-11-08
Category : Technology & Engineering
ISBN : 9780081003589

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Materials and Processes for Next Generation Lithography by Anonim Pdf

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place

Author : Weimin Zhou
Publisher : Springer Science & Business Media
Page : 270 pages
File Size : 47,8 Mb
Release : 2013-01-04
Category : Technology & Engineering
ISBN : 9783642344282

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Nanoimprint Lithography: An Enabling Process for Nanofabrication by Weimin Zhou Pdf

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

Author : Manijeh Razeghi
Publisher : Springer Science & Business Media
Page : 570 pages
File Size : 47,8 Mb
Release : 2009-12-11
Category : Technology & Engineering
ISBN : 9781441910561

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Technology of Quantum Devices by Manijeh Razeghi Pdf

Technology of Quantum Devices offers a multi-disciplinary overview of solid state physics, photonics and semiconductor growth and fabrication. Readers will find up-to-date coverage of compound semiconductors, crystal growth techniques, silicon and compound semiconductor device technology, in addition to intersubband and semiconductor lasers. Recent findings in quantum tunneling transport, quantum well intersubband photodetectors (QWIP) and quantum dot photodetectors (QWDIP) are described, along with a thorough set of sample problems.

Author : Richard H. Van Atta
Publisher : Unknown
Page : 106 pages
File Size : 47,9 Mb
Release : 1988
Category : Microelectronics industry
ISBN : UCSD:31822019058577

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Microelectronics Manufacturing Technology by Richard H. Van Atta Pdf

Author : Jagannathan Thirumalai
Publisher : BoD – Books on Demand
Page : 136 pages
File Size : 41,7 Mb
Release : 2018-05-02
Category : Technology & Engineering
ISBN : 9781789230307

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Micro/Nanolithography by Jagannathan Thirumalai Pdf

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction of periodic nanopyramid structures using UV nanoimprint lithography for solar cell applications, large-area nanoimprint lithography and applications, micro-/nanopatterning on polymers, OPC under immersion lithography associated to novel luminescence applications, achromatic Talbot lithography (ATL) and the soft X-ray interference lithography. Individual chapters provide a base for a wide range of readers from different fiels, students and researchers, who may be doing research pertinent to the topics discussed in this book and find basic as well as advanced principles of designated subjects related to these phenomena explained plainly. The book contains six chapters by experts in different fields of lithographic fabrication and technology from over 15 research institutes across the globe.

Author : Yu Kyoung Ryu,Javier Martinez Rodrigo
Publisher : CRC Press
Page : 145 pages
File Size : 41,6 Mb
Release : 2022-12-22
Category : Technology & Engineering
ISBN : 9781000804867

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Scanning Probe Lithography by Yu Kyoung Ryu,Javier Martinez Rodrigo Pdf

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.

Author : Massimo Rudan,Rossella Brunetti,Susanna Reggiani
Publisher : Springer Nature
Page : 1680 pages
File Size : 48,5 Mb
Release : 2022-11-10
Category : Technology & Engineering
ISBN : 9783030798277

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Springer Handbook of Semiconductor Devices by Massimo Rudan,Rossella Brunetti,Susanna Reggiani Pdf

This Springer Handbook comprehensively covers the topic of semiconductor devices, embracing all aspects from theoretical background to fabrication, modeling, and applications. Nearly 100 leading scientists from industry and academia were selected to write the handbook's chapters, which were conceived for professionals and practitioners, material scientists, physicists and electrical engineers working at universities, industrial R&D, and manufacturers. Starting from the description of the relevant technological aspects and fabrication steps, the handbook proceeds with a section fully devoted to the main conventional semiconductor devices like, e.g., bipolar transistors and MOS capacitors and transistors, used in the production of the standard integrated circuits, and the corresponding physical models. In the subsequent chapters, the scaling issues of the semiconductor-device technology are addressed, followed by the description of novel concept-based semiconductor devices. The last section illustrates the numerical simulation methods ranging from the fabrication processes to the device performances. Each chapter is self-contained, and refers to related topics treated in other chapters when necessary, so that the reader interested in a specific subject can easily identify a personal reading path through the vast contents of the handbook.